dc.contributor.author | Delabie, Annelies | |
dc.contributor.author | Caymax, Matty | |
dc.contributor.author | Gielis, Sven | |
dc.contributor.author | Maes, Jan | |
dc.contributor.author | Nyns, Laura | |
dc.contributor.author | Popovici, Mihaela Ioana | |
dc.contributor.author | Swerts, Johan | |
dc.contributor.author | Tielens, Hilde | |
dc.contributor.author | Jozef, Peeters | |
dc.contributor.author | Van Elshocht, Sven | |
dc.date.accessioned | 2021-10-18T15:58:32Z | |
dc.date.available | 2021-10-18T15:58:32Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17002 | |
dc.source | IIOimport | |
dc.title | Ozone based atomic layer deposition of metal oxides: impact of N2/O2 supply ratio in ozone generation | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.imecauthor | Maes, Jan | |
dc.contributor.imecauthor | Nyns, Laura | |
dc.contributor.imecauthor | Popovici, Mihaela Ioana | |
dc.contributor.imecauthor | Swerts, Johan | |
dc.contributor.imecauthor | Tielens, Hilde | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.orcidimec | Nyns, Laura::0000-0001-8220-870X | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.source.peerreview | no | |
dc.source.conference | 10th International Conference on Atomic Layer Deposition - AVS-ALD | |
dc.source.conferencedate | 20/06/2010 | |
dc.source.conferencelocation | Seoul Korea | |
imec.availability | Published - imec | |