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Ozone based atomic layer deposition of metal oxides: impact of N2/O2 supply ratio in ozone generation

dc.contributor.authorDelabie, Annelies
dc.contributor.authorCaymax, Matty
dc.contributor.authorGielis, Sven
dc.contributor.authorMaes, Jan
dc.contributor.authorNyns, Laura
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSwerts, Johan
dc.contributor.authorTielens, Hilde
dc.contributor.authorJozef, Peeters
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-18T15:58:32Z
dc.date.available2021-10-18T15:58:32Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17002
dc.sourceIIOimport
dc.titleOzone based atomic layer deposition of metal oxides: impact of N2/O2 supply ratio in ozone generation
dc.typeMeeting abstract
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorTielens, Hilde
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewno
dc.source.conference10th International Conference on Atomic Layer Deposition - AVS-ALD
dc.source.conferencedate20/06/2010
dc.source.conferencelocationSeoul Korea
imec.availabilityPublished - imec


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