Publication:
Quantifying LER and its impact on BEOL TDDB reliability at 20nm ½ pitch
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1844 since deposited on 2021-10-18
5last month
Acq. date: 2026-01-08
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Metrics
Views
1844 since deposited on 2021-10-18
5last month
Acq. date: 2026-01-08
Citations