Authors

Detalle, Mikael; Rakowski, Michal; Potoms, Goedele; Mercha, Abdelkarim; de Potter de ten Broeck, Muriel; Phommahaxay, Alain; Sabuncuoglu Tezcan, Deniz; Soussan, Philippe

Conference

218th ECS Meeting Symposium 'Processing, Materials, and Integration of Damascene and 3D Interconnects'

Title

CMOS compatible anodization process for low cost high density capacitors

Publication type

Meeting abstract