Authors

Ebihara, K.; Harada, S.; Kikkawa, J.; Nakamura, Y.; Sakai, A.; Wang, Gang; Caymax, Matty; Imai, Y.; Kimura, S.; Sakata, O.

Conference

SiGe, Ge, and related Compounds 4: Materials, Processing and Devices

Title

X-ray microdiffraction study on crystallinity of micron-sized Ge films selectively grown on Si(001) substrates

Publication type

Proceedings paper

Embargo date

9999-12-31