Publication:
Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210C
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1934 since deposited on 2021-10-18
2last month
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Acq. date: 2026-02-25
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Statistics
Views
1934 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-02-25
Citations