Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210C

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Authors
El Rifai, Joumana; Sedky, Sherif; Abdel Aziz, Ahmed; Puers, Bob; Van Hoof, Chris; Witvrouw, Ann
Conference
MRS Fall Meeting Symposium S: Micromechanical Systems - Materials and Devices IV
Title
Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210C
Publication type
Meeting abstract
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