Show simple item record

Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210C

dc.contributor.authorEl Rifai, Joumana
dc.contributor.authorSedky, Sherif
dc.contributor.authorAbdel Aziz, Ahmed
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-18T16:11:16Z
dc.date.available2021-10-18T16:11:16Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17061
dc.sourceIIOimport
dc.titleContact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210C
dc.typeMeeting abstract
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewyes
dc.source.beginpageS2.5
dc.source.conferenceMRS Fall Meeting Symposium S: Micromechanical Systems - Materials and Devices IV
dc.source.conferencedate29/11/2010
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record