Selective laser annealing for improved SiGe MEMS structural layers at 210°C

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Authors
El Rifai, Joumana; Witvrouw, Ann; Abdel Aziz, Ahmed; Puers, Bob; Van Hoof, Chris; Sedky, Sherif
Conference
23rd IEEE International Conference on Micro Electro Mechanical Systems - MEMS
Title
Selective laser annealing for improved SiGe MEMS structural layers at 210°C
Publication type
Proceedings paper
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