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Determination of the film thickness of SIMOX substrates using simple calibration curves

dc.contributor.authorBadenes, Gonçal
dc.contributor.authorLosantos, P.
dc.contributor.authorCane, C.
dc.contributor.authorLora-Tamayo, E.
dc.date.accessioned2021-09-30T07:55:05Z
dc.date.available2021-09-30T07:55:05Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1706
dc.sourceIIOimport
dc.titleDetermination of the film thickness of SIMOX substrates using simple calibration curves
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage515
dc.source.endpage9
dc.source.conferenceCDE-97 : Actas de la 1a Conferencia de Dispositivos Electrónicos (EDC - Proceedings of the Electronic Devices Conference); 20-21
dc.source.conferencelocation
imec.availabilityPublished - imec


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