Polysilicon encapsulated local oxidation of silicon for deep submicron lateral isolation

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Authors

Badenes, Gonçal; Rooyackers, Rita; De Wolf, Ingrid; Deferm, Ludo

Issue

3B

Journal

Japanese Journal of Applied Physics. Part 1

Volume

36

Title

Polysilicon encapsulated local oxidation of silicon for deep submicron lateral isolation

Publication type

Journal article

Embargo date

9999-12-31

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