Polysilicon encapsulated LOCOS: a technique for deep submicron lateral isolation

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Authors
Badenes, Gonçal; Rooyackers, Rita; Deferm, Ludo
Conference
Actas de la Conferencia de Dispositivos Electrónicos - CDE
Title
Polysilicon encapsulated LOCOS: a technique for deep submicron lateral isolation
Publication type
Proceedings paper
Embargo date
9999-12-31
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