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Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance
Publication:
Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance
Date
2010
Meeting abstract
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21275.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Everaert, Jean-Luc
;
Rosseel, Erik
;
Meszaros, A.
;
Kis-Szabo, K.
;
Tutto, P.
;
Pap, A.
;
Pavelka, T.
;
Wilson, M.
;
Findlay, A.
;
Jastrzebski, L.
;
Lagowski, J.
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Abstract
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1
since deposited on 2021-10-18
Acq. date: 2025-10-26
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1839
since deposited on 2021-10-18
Acq. date: 2025-10-26
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Downloads
1
since deposited on 2021-10-18
Acq. date: 2025-10-26
Views
1839
since deposited on 2021-10-18
Acq. date: 2025-10-26
Citations