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Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance

dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorRosseel, Erik
dc.contributor.authorMeszaros, A.
dc.contributor.authorKis-Szabo, K.
dc.contributor.authorTutto, P.
dc.contributor.authorPap, A.
dc.contributor.authorPavelka, T.
dc.contributor.authorWilson, M.
dc.contributor.authorFindlay, A.
dc.contributor.authorJastrzebski, L.
dc.contributor.authorLagowski, J.
dc.date.accessioned2021-10-18T16:17:10Z
dc.date.available2021-10-18T16:17:10Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17086
dc.sourceIIOimport
dc.titleNovel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance
dc.typeMeeting abstract
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorRosseel, Erik
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage917
dc.source.conference217th ECS Meeting
dc.source.conferencedate25/04/2010
dc.source.conferencelocationVancouver Canada
imec.availabilityPublished - open access
imec.internalnotesMeeting Abstracts; Vol. 1002


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