Authors

Everaert, Jean-Luc; Rosseel, Erik; Pap, Aron; Meszaros, Albert; Dekoster, Johan; Pavelka, Tibor

Conference

16th Workshop on Dielectrics in Microelectronics- WoDIM

Title

Non-contact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric

Publication type

Oral presentation