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Non-contact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric

dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorRosseel, Erik
dc.contributor.authorPap, Aron
dc.contributor.authorMeszaros, Albert
dc.contributor.authorDekoster, Johan
dc.contributor.authorPavelka, Tibor
dc.date.accessioned2021-10-18T16:17:39Z
dc.date.available2021-10-18T16:17:39Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17088
dc.sourceIIOimport
dc.titleNon-contact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
dc.typeOral presentation
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorDekoster, Johan
dc.source.peerreviewno
dc.source.conference16th Workshop on Dielectrics in Microelectronics- WoDIM
dc.source.conferencedate28/06/2010
dc.source.conferencelocationBratislava Slovakia
dc.identifier.urlhttp://www.wodim2010.sk/program.html
imec.availabilityPublished - imec


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