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Polysilicon encapsulated LOCOS: a technique for deep submicron lateral isolation

dc.contributor.authorBadenes, Gonçal
dc.contributor.authorRooyackers, Rita
dc.contributor.authorDeferm, Ludo
dc.date.accessioned2021-09-30T07:55:10Z
dc.date.available2021-09-30T07:55:10Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1708
dc.sourceIIOimport
dc.titlePolysilicon encapsulated LOCOS: a technique for deep submicron lateral isolation
dc.typeProceedings paper
dc.contributor.imecauthorDeferm, Ludo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage215
dc.source.endpage220
dc.source.conferenceActas de la Conferencia de Dispositivos Electrónicos - CDE
dc.source.conferencedate20/02/1997
dc.source.conferencelocationBarcelona Spain
imec.availabilityPublished - open access


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