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dc.contributor.authorEyben, Pierre
dc.contributor.authorMody, Jay
dc.contributor.authorNazir, Aftab
dc.contributor.authorSchulze, Andreas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-18T16:18:38Z
dc.date.available2021-10-18T16:18:38Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17092
dc.sourceIIOimport
dc.titleDevelopment and optimization of FIB-based sample preparation for SSRM
dc.typeOral presentation
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorNazir, Aftab
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conferenceE-MRS Fall Symposium D: Multidimensional electrical and chemical characterization at the nanometer-scale of organic ...
dc.source.conferencedate13/09/2010
dc.source.conferencelocationWarsaw Poland
imec.availabilityPublished - imec


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