Nano beam diffraction: crystal structure and strain analysis at the nano-scale

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Authors
Favia, Paola; Popovici, Mihaela Ioana; Eneman, Geert; Wang, Gang; Bargallo Gonzalez, Mireia; Simoen, Eddy; Menou, Nicolas; Bender, Hugo
Conference
218th ECS Meeting: High Purity Silicon 11
Title
Nano beam diffraction: crystal structure and strain analysis at the nano-scale
Publication type
Meeting abstract
Embargo date
9999-12-31
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