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Nano beam diffraction: crystal structure and strain analysis at the nano-scale

dc.contributor.authorFavia, Paola
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorEneman, Geert
dc.contributor.authorWang, Gang
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorSimoen, Eddy
dc.contributor.authorMenou, Nicolas
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-18T16:20:08Z
dc.date.available2021-10-18T16:20:08Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17098
dc.sourceIIOimport
dc.titleNano beam diffraction: crystal structure and strain analysis at the nano-scale
dc.typeMeeting abstract
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1572
dc.source.conference218th ECS Meeting: High Purity Silicon 11
dc.source.conferencedate10/10/2010
dc.source.conferencelocationLas Vegas, NV USA
imec.availabilityPublished - open access
imec.internalnotesECS Meeting Abstracts; Vol. MA 2010-02


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