Analog performance of SOI FinFETs with different TiN gate electrode thickness

Thumbnail
View/open
Metadata
Show full item record
Authors
Galeti, M.; Rodrigues, M.; Collaert, Nadine; Simoen, Eddy; Claeys, Cor; Martino, J.A.
Conference
Microelectronics Technology and Devices - SBMICRO 2010
Title
Analog performance of SOI FinFETs with different TiN gate electrode thickness
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections