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Study of leakage mechanism and trap density in porous low-k materials

dc.contributor.authorGianni, Giai Gischia
dc.contributor.authorCroes, Kristof
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorTokei, Zsolt
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorZhao, Larry
dc.date.accessioned2021-10-18T16:32:41Z
dc.date.available2021-10-18T16:32:41Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17146
dc.sourceIIOimport
dc.titleStudy of leakage mechanism and trap density in porous low-k materials
dc.typeProceedings paper
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewno
dc.source.beginpage549
dc.source.endpage555
dc.source.conference48th Annual IEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate2/05/2010
dc.source.conferencelocationAnaheim, CA USA
imec.availabilityPublished - imec


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