Authors

Gong, Chun; Simoen, Eddy; Posthuma, Niels; Van Kerschaver, Emmanuel; Poortmans, Jef; Mertens, Robert

ISSN

0003-6951

Issue

10

Journal

Applied Physics Letters

Volume

96

Title

A deep-level transient spectroscopy study of silicon interface states using different silicon nitride surface passivation schemes

Publication type

Journal article