Publication:
Feasibility of TiSi2 and CoSi2 for sub quarter micron processes: problems of the etch selectivity
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1899 since deposited on 2021-09-30
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Acq. date: 2026-10-07
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Statistics
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1899 since deposited on 2021-09-30
2last month
2last week
Acq. date: 2026-10-07
Citations