Applicability of HF solutions for the cleaning of TiSi2 surface

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Authors
Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen
Conference
Materials for Advanced Metallization. MAM'97 Abstracts Booklet; European Workshop Materials for Advanced Metallization. MAM'97 A
Title
Applicability of HF solutions for the cleaning of TiSi2 surface
Publication type
Proceedings paper
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