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Applicability of HF solutions for the cleaning of TiSi2 surface

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorVanhaelemeersch, Serge
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-09-30T07:55:39Z
dc.date.available2021-09-30T07:55:39Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1718
dc.sourceIIOimport
dc.titleApplicability of HF solutions for the cleaning of TiSi2 surface
dc.typeProceedings paper
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.source.peerreviewno
dc.source.beginpage110
dc.source.endpage112
dc.source.conferenceMaterials for Advanced Metallization. MAM'97 Abstracts Booklet; European Workshop Materials for Advanced Metallization. MAM'97 A
dc.source.conferencelocation
imec.availabilityPublished - imec


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