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EUV RLS performance tradeoffs for a polymer bound PAG resist

dc.contributor.authorGronheid, Roel
dc.contributor.authorVaglio Pret, Alessandro
dc.contributor.authorRathsack, Benjamin
dc.contributor.authorHooge, Joshua
dc.contributor.authorScheer, Steven
dc.contributor.authorNafus, Kathleen
dc.contributor.authorShite, Hideo
dc.contributor.authorKitano, Junichi
dc.date.accessioned2021-10-18T16:45:45Z
dc.date.available2021-10-18T16:45:45Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17195
dc.sourceIIOimport
dc.titleEUV RLS performance tradeoffs for a polymer bound PAG resist
dc.typeProceedings paper
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorVaglio Pret, Alessandro
dc.contributor.imecauthorScheer, Steven
dc.contributor.imecauthorNafus, Kathleen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage76390M
dc.source.conferenceAdvances in Resist Materials and Processing Technology XXVII
dc.source.conferencedate21/02/2010
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access
imec.internalnotesSPIE Proceedings; Vol.7639


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