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EUV reolution-LWR-sensitivity performance tradeoffs for a polymer bound PAG resist
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Authors
Gronheid, Roel
;
Vaglio Pret, Alessandro
;
Rathsack, Benjamin
;
Hooge, Joshua
;
Scheer, Steven
;
Nafus, Kathleen
;
Shite, Hideo
;
Kitano, Junichi
Conference
54th International conference on Electron, Ion and Photon Beam Technology and Nanofabrication - EIPBN
Title
EUV reolution-LWR-sensitivity performance tradeoffs for a polymer bound PAG resist
Publication type
Oral presentation
Embargo date
9999-12-31
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