dc.contributor.author | Gronheid, Roel | |
dc.contributor.author | Vaglio Pret, Alessandro | |
dc.contributor.author | Rathsack, Benjamin | |
dc.contributor.author | Hooge, Joshua | |
dc.contributor.author | Scheer, Steven | |
dc.contributor.author | Nafus, Kathleen | |
dc.contributor.author | Shite, Hideo | |
dc.contributor.author | Kitano, Junichi | |
dc.date.accessioned | 2021-10-18T16:46:02Z | |
dc.date.available | 2021-10-18T16:46:02Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17196 | |
dc.source | IIOimport | |
dc.title | EUV reolution-LWR-sensitivity performance tradeoffs for a polymer bound PAG resist | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Gronheid, Roel | |
dc.contributor.imecauthor | Vaglio Pret, Alessandro | |
dc.contributor.imecauthor | Scheer, Steven | |
dc.contributor.imecauthor | Nafus, Kathleen | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | 54th International conference on Electron, Ion and Photon Beam Technology and Nanofabrication - EIPBN | |
dc.source.conferencedate | 1/06/2010 | |
dc.source.conferencelocation | Anchorage, AL USA | |
imec.availability | Published - open access | |