Authors

Halder, Sandip; Vos, Rita; Wada, Masayuki; Claes, Martine; Kenis, Karine; Mertens, Paul; Dighe, Prasanna; Radovanovic, Sanda; Simpson, Gavin; Sonnemans, Roger

Conference

10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS

Title

Using the background signal of a light scattering tool for I/I photo resist strip optimization and monitoring

Publication type

Meeting abstract

Embargo date

9999-12-31