Publication:

Fullfield 27nm CD control and modeling

Date

2010
Proceedings Paper
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Author(s)

Hendrickx, Eric  
;
Philipsen, Vicky  
;
Hermans, Jan  
;
Lorusso, Gian  
;
Vandenberghe, Geert  
;
Ronse, Kurt  
;
Klosterman, Ulrich
;
Gao, Weimin
;
Schmoeller, Thomas

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