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Degradation and failure analysis of copper and tungsten contacts under high fluence stress

dc.contributor.authorKauerauf, Thomas
dc.contributor.authorButera, Geni
dc.contributor.authorCroes, Kristof
dc.contributor.authorDemuynck, Steven
dc.contributor.authorWilson, Chris
dc.contributor.authorRoussel, Philippe
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorBender, Hugo
dc.contributor.authorLofrano, Melina
dc.contributor.authorVandevelde, Bart
dc.contributor.authorTokei, Zsolt
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-18T17:34:03Z
dc.date.available2021-10-18T17:34:03Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17356
dc.sourceIIOimport
dc.titleDegradation and failure analysis of copper and tungsten contacts under high fluence stress
dc.typeProceedings paper
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage712
dc.source.endpage716
dc.source.conference48th Annual IEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate3/05/2010
dc.source.conferencelocationAnaheim, CA USA
imec.availabilityPublished - open access


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