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3D analysis of carbon nanotube networks in interconnects by electron tomography without missing wedge artefacts
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Authors
Ke, Xiaoxing
;
Bals, Sarah
;
Cott, Daire
;
Hantschel, Thomas
;
Bender, Hugo
;
Van Tendeloo, Gustaaf
ISSN
1431-9276
Journal
Microscopy and Microanalysis
Volume
16
Title
3D analysis of carbon nanotube networks in interconnects by electron tomography without missing wedge artefacts
Publication type
Journal article
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