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From 2D to 3D: FIB sample preparation for carbon nanotube interconnects

dc.contributor.authorKe, Xiaoxing
dc.contributor.authorBals, Sarah
dc.contributor.authorRomo Negreira, Ainhoa
dc.contributor.authorCott, Daire
dc.contributor.authorHantschel, Thomas
dc.contributor.authorBender, Hugo
dc.contributor.authorVan Tendeloo, Gustaaf
dc.date.accessioned2021-10-18T17:34:40Z
dc.date.available2021-10-18T17:34:40Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17358
dc.sourceIIOimport
dc.titleFrom 2D to 3D: FIB sample preparation for carbon nanotube interconnects
dc.typeProceedings paper
dc.contributor.imecauthorRomo Negreira, Ainhoa
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conference17th International Microscopy Congress
dc.source.conferencedate20/09/2010
dc.source.conferencelocationRio de Janeiro Brasil
imec.availabilityPublished - imec


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