Publication:
Influence of photoresist and BARC selection on the efficiency of a post-etch wet strip in BEOL applications
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1830 since deposited on 2021-10-18
6last month
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Acq. date: 2026-08-10
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Statistics
Views
1830 since deposited on 2021-10-18
6last month
1last week
Acq. date: 2026-08-10
Citations