Modification of BARC layer by UV irradiation for post-etch wet strip applications in BEOL

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Authors
Kesters, Els; Lux, Marcel; Pittevils, Joris; Vereecke, Guy
Conference
3rd International Plasma Etch and Strip in Microelectronics Workshop - PESM
Title
Modification of BARC layer by UV irradiation for post-etch wet strip applications in BEOL
Publication type
Meeting abstract
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