Authors

Kobayashi, Daisuke; Bargallo Gonzalez, Mireia; Rosseel, Erik; Hikavyy, Andriy; Hirose, Kazuyuki; Simoen, Eddy; Claeys, Cor

Conference

218th ECS Meeting

Title

Combined IV and CV analysis of laser annealed carbon and boron implanted SiGe epitaxial layers

Publication type

Meeting abstract

Embargo date

9999-12-31