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Combined IV and CV analysis of laser annealed carbon and boron implanted SiGe epitaxial layers

dc.contributor.authorKobayashi, Daisuke
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorRosseel, Erik
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorHirose, Kazuyuki
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-18T17:44:17Z
dc.date.available2021-10-18T17:44:17Z
dc.date.issued2010-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17389
dc.sourceIIOimport
dc.titleCombined IV and CV analysis of laser annealed carbon and boron implanted SiGe epitaxial layers
dc.typeMeeting abstract
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1571
dc.source.conference218th ECS Meeting
dc.source.conferencedate10/10/2010
dc.source.conferencelocationLas Vegas, NV USA
imec.availabilityPublished - open access
imec.internalnotesECS Meeting Abstracts; Vol. MA2010-02


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