Authors

Lambrinou, Konstantza; Hantschel, Thomas; Arstila, Kai; Kleindiek, Stephan; Rummel, Andreas; Tokei, Zsolt; Croes, Kristof; Pantouvaki, Marianna; Czarnecki, Piotr; De Wolf, Ingrid; Vandervorst, Wilfried

Conference

Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics

Title

Towards the understanding of resistive contrast imaging in in situ dielectric breakdown studies using a nanoprober setup

Publication type

Proceedings paper