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Protein patterning on polycrystalline silicon–germanium via standard UV lithography for bioMEMS applications
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Authors
Lenci, Silvia
;
Tedeschi, Lorena
;
Domenici, Claudio
;
Lande, Caterina
;
Nannini, Andrea
;
Pennelli, Giovanni
;
Pieri, Francesco
;
Severi, Simone
ISSN
0928-4931
Issue
8
Journal
Materials Science and Engineering C
Volume
30
Title
Protein patterning on polycrystalline silicon–germanium via standard UV lithography for bioMEMS applications
Publication type
Journal article
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