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Stiction reduction in electrostatic poly-SiGe micromirrors by applying a self-assembled monolayer film

dc.contributor.authorLing, Fangzhou
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorBeernaert, Roel
dc.contributor.authorLin, Wan-Yu
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-18T18:22:09Z
dc.date.available2021-10-18T18:22:09Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17505
dc.sourceIIOimport
dc.titleStiction reduction in electrostatic poly-SiGe micromirrors by applying a self-assembled monolayer film
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage44
dc.source.endpage47
dc.source.conference21st Micromechanics and Micro Systems Europe Workshop - MME
dc.source.conferencedate26/09/2010
dc.source.conferencelocationEnschede Netherlands
imec.availabilityPublished - imec


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