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Solid phase epitaxy of amorphous Ge films deposited by PECVD

dc.contributor.authorMa, Quanbao
dc.contributor.authorLieten, Ruben
dc.contributor.authorDegroote, Stefan
dc.contributor.authorLeys, Maarten
dc.contributor.authorGermain, Marianne
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-10-18T18:34:32Z
dc.date.available2021-10-18T18:34:32Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17540
dc.sourceIIOimport
dc.titleSolid phase epitaxy of amorphous Ge films deposited by PECVD
dc.typeMeeting abstract
dc.contributor.imecauthorLieten, Ruben
dc.contributor.imecauthorBorghs, Gustaaf
dc.source.peerreviewyes
dc.source.conference18th International Vacuum Congress - IVC
dc.source.conferencedate23/08/2010
dc.source.conferencelocationBeijing China
imec.availabilityPublished - imec


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