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10 μm pixel-to-pixel pitch hybrid backside illuminated AlGaN-on-Si imagers for solar blind EUV radiation detection

dc.contributor.authorMalinowski, Pawel
dc.contributor.authorDuboz, Jean-Yves
dc.contributor.authorDe Moor, Piet
dc.contributor.authorJohn, Joachim
dc.contributor.authorMinoglou, Kiki
dc.contributor.authorSrivastava, Puneet
dc.contributor.authorCreten, Ybe
dc.contributor.authorTorfs, Tom
dc.contributor.authorPutzeys, Jan
dc.contributor.authorSemond, Fabrice
dc.contributor.authorFrayssinet, Eric
dc.contributor.authorGiordanengo, Boris
dc.contributor.authorBenMoussa, Ali
dc.contributor.authorHochedez, Jean Francois
dc.contributor.authorMertens, Robert
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-18T18:41:29Z
dc.date.available2021-10-18T18:41:29Z
dc.date.issued2010-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17559
dc.sourceIIOimport
dc.title10 μm pixel-to-pixel pitch hybrid backside illuminated AlGaN-on-Si imagers for solar blind EUV radiation detection
dc.typeProceedings paper
dc.contributor.imecauthorMalinowski, Pawel
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorTorfs, Tom
dc.contributor.imecauthorPutzeys, Jan
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecMalinowski, Pawel::0000-0002-2934-470X
dc.contributor.orcidimecTorfs, Tom::0000-0002-1302-3346
dc.contributor.orcidimecPutzeys, Jan::0000-0001-8834-5852
dc.contributor.orcidimecJohn, Joachim::0000-0003-0155-2854
dc.contributor.orcidimecVan Hoof, Chris::0000-0002-4645-3326
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage348
dc.source.endpage351
dc.source.conferenceIEEE International Electron Devices Meeting - IEDM
dc.source.conferencedate6/12/2010
dc.source.conferencelocationSan Francisco USA
imec.availabilityPublished - imec


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