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Spatially resolved dynamics of methyl groups removal from SiOCH films by oxygen atoms. Monte-Carlo model of O atoms behavior in nanoporous material

dc.contributor.authorMankelevivh, Yu.A.
dc.contributor.authorBraginsky, O.V
dc.contributor.authorKovalev, A.S.
dc.contributor.authorLopaev, D.V.
dc.contributor.authorMalykhin, E.M.
dc.contributor.authorRakhimova, T.V.
dc.contributor.authorRakhimov, A.T.
dc.contributor.authorVasilieva, A.N.
dc.contributor.authorZyryanov, S.M
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-18T18:44:41Z
dc.date.available2021-10-18T18:44:41Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17568
dc.sourceIIOimport
dc.titleSpatially resolved dynamics of methyl groups removal from SiOCH films by oxygen atoms. Monte-Carlo model of O atoms behavior in nanoporous material
dc.typeMeeting abstract
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM
dc.source.conferencedate8/03/2010
dc.source.conferencelocationMechelen Belgium
imec.availabilityPublished - open access


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