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Record low contact resistivity to n-type Ge for CMOS and memory applications
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Authors
Martens, Koen
;
Firrincieli, Andrea
;
Rooyackers, Rita
;
Vincent, Benjamin
;
Loo, Roger
;
Locorotondo, Sabrina
;
Rosseel, Erik
;
Vandeweyer, Tom
;
Hellings, Geert
;
De Jaeger, Brice
;
Meuris, Marc
;
Favia, Paola
;
Bender, Hugo
;
Douhard, Bastien
;
Delmotte, Joris
;
Vandervorst, Wilfried
;
Simoen, Eddy
;
Jurczak, Gosia
;
Wouters, Dirk
;
Kittl, Jorge
Conference
IEEE International Electron Devices Meeting - IEDM
Title
Record low contact resistivity to n-type Ge for CMOS and memory applications
Publication type
Proceedings paper
Embargo date
9999-12-31
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