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Record low contact resistivity to n-type Ge for CMOS and memory applications

dc.contributor.authorMartens, Koen
dc.contributor.authorFirrincieli, Andrea
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVincent, Benjamin
dc.contributor.authorLoo, Roger
dc.contributor.authorLocorotondo, Sabrina
dc.contributor.authorRosseel, Erik
dc.contributor.authorVandeweyer, Tom
dc.contributor.authorHellings, Geert
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorMeuris, Marc
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorDouhard, Bastien
dc.contributor.authorDelmotte, Joris
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorSimoen, Eddy
dc.contributor.authorJurczak, Gosia
dc.contributor.authorWouters, Dirk
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-18T18:53:08Z
dc.date.available2021-10-18T18:53:08Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17591
dc.sourceIIOimport
dc.titleRecord low contact resistivity to n-type Ge for CMOS and memory applications
dc.typeProceedings paper
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorFirrincieli, Andrea
dc.contributor.imecauthorVincent, Benjamin
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorLocorotondo, Sabrina
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorVandeweyer, Tom
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceIEEE International Electron Devices Meeting - IEDM
dc.source.conferencedate6/12/2010
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access


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