dc.contributor.author | Martens, Koen | |
dc.contributor.author | Firrincieli, Andrea | |
dc.contributor.author | Rooyackers, Rita | |
dc.contributor.author | Vincent, Benjamin | |
dc.contributor.author | Loo, Roger | |
dc.contributor.author | Locorotondo, Sabrina | |
dc.contributor.author | Rosseel, Erik | |
dc.contributor.author | Vandeweyer, Tom | |
dc.contributor.author | Hellings, Geert | |
dc.contributor.author | De Jaeger, Brice | |
dc.contributor.author | Meuris, Marc | |
dc.contributor.author | Favia, Paola | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Douhard, Bastien | |
dc.contributor.author | Delmotte, Joris | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Jurczak, Gosia | |
dc.contributor.author | Wouters, Dirk | |
dc.contributor.author | Kittl, Jorge | |
dc.date.accessioned | 2021-10-18T18:53:08Z | |
dc.date.available | 2021-10-18T18:53:08Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17591 | |
dc.source | IIOimport | |
dc.title | Record low contact resistivity to n-type Ge for CMOS and memory applications | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Martens, Koen | |
dc.contributor.imecauthor | Firrincieli, Andrea | |
dc.contributor.imecauthor | Vincent, Benjamin | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.imecauthor | Locorotondo, Sabrina | |
dc.contributor.imecauthor | Rosseel, Erik | |
dc.contributor.imecauthor | Vandeweyer, Tom | |
dc.contributor.imecauthor | Hellings, Geert | |
dc.contributor.imecauthor | De Jaeger, Brice | |
dc.contributor.imecauthor | Meuris, Marc | |
dc.contributor.imecauthor | Favia, Paola | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Douhard, Bastien | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.imecauthor | Jurczak, Gosia | |
dc.contributor.orcidimec | Martens, Koen::0000-0001-7135-5536 | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.contributor.orcidimec | Hellings, Geert::0000-0002-5376-2119 | |
dc.contributor.orcidimec | De Jaeger, Brice::0000-0001-8804-7556 | |
dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
dc.contributor.orcidimec | Favia, Paola::0000-0002-1019-3497 | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | IEEE International Electron Devices Meeting - IEDM | |
dc.source.conferencedate | 6/12/2010 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - open access | |