Authors

Merckling, Clement; Chang, Yao-Chung; Penaud, Julien; Lu, Chung-Yu; Brammertz, Guy; Meuris, Marc; Dekoster, Johan; Heyns, Marc; Caymax, Matty

Conference

E-MRS Spring Meeting Symposium H: Post-Si CMOS Electronic Devices: The Role of Ge and III-V Materials

Title

Molecular beam passivation of Ge and III-V semiconductors for advanced CMOS

Publication type

Meeting abstract