C2H4-based plasma-assisted CD shrink and contact patterning for RRAM application

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Authors
Milenin, Alexey; Lisoni, Judit; Jossart, Nico; Jurczak, Gosia; Struyf, Herbert; Shamiryan, Denis; Brouri, Mohand; Boullart, Werner
Conference
Advanced Interconnects and Chemical Planarization for Micro- and Nanoelectronics
Title
C2H4-based plasma-assisted CD shrink and contact patterning for RRAM application
Publication type
Proceedings paper
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