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Properties of diamond films grown by MWPECVD with DC substrate bias

dc.contributor.authorMortet, Vincent
dc.contributor.authorZhang, L.
dc.contributor.authorEckert, M.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorSotani, A.
dc.contributor.authorMoreau, M.
dc.contributor.authorSaitner, M.
dc.contributor.authorTroadec, D.
dc.contributor.authorNeyts, E.
dc.contributor.authorde Jaeger, J.C.
dc.contributor.authorVerbeeck, J.
dc.contributor.authorBogaerts, A.
dc.contributor.authorBoyen, H.G.
dc.contributor.authorVan Tendeloo, G.
dc.contributor.authorHaenen, Ken
dc.contributor.authorWagner, Patrick
dc.date.accessioned2021-10-18T19:18:27Z
dc.date.available2021-10-18T19:18:27Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17655
dc.sourceIIOimport
dc.titleProperties of diamond films grown by MWPECVD with DC substrate bias
dc.typeMeeting abstract
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceEngineering of Functional Interfaces - EnFI
dc.source.conferencedate15/07/2010
dc.source.conferencelocationMarburg Germany
imec.availabilityPublished - imec


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