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Selective epitaxial growth of III-V semiconductor heterostructures on Si substrates for logic appliation
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Authors
Nguyen, Duy
;
Wang, Gang
;
Brammertz, Guy
;
Leys, Maarten
;
Waldron, Niamh
;
Winderickx, Gillis
;
Lismont, Kevin
;
Dekoster, Johan
;
Loo, Roger
;
Meuris, Marc
;
Degroote, Stefan
;
Buttita, F
;
O'Neil, B.
;
Féron, O.
;
Lindner, J.
;
Schulte, F.
;
Schineller, B.
;
Heuken, M.
;
Caymax, Matty
Conference
SiGe, Ge, and Related Compounds 4: Materials, Processing and Devices
Title
Selective epitaxial growth of III-V semiconductor heterostructures on Si substrates for logic appliation
Publication type
Proceedings paper
Embargo date
9999-12-31
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