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Selective epitaxial growth of III-V semiconductor heterostructures on Si substrates for logic applications

dc.contributor.authorNguyen, Duy
dc.contributor.authorWang, Gang
dc.contributor.authorWaldron, Niamh
dc.contributor.authorWinderickx, Gillis
dc.contributor.authorBrammertz, Guy
dc.contributor.authorLeys, Maarten
dc.contributor.authorLismont, Kevin
dc.contributor.authorDekoster, Johan
dc.contributor.authorLoo, Roger
dc.contributor.authorMeuris, Marc
dc.contributor.authorDegroote, Stefan
dc.contributor.authorCaymax, Matty
dc.contributor.authorFeron, O.
dc.contributor.authorButtitta, F.
dc.contributor.authorO'Neil, B.
dc.contributor.authorLindner, J.
dc.contributor.authorSchulte, F.
dc.contributor.authorSchineller, B.
dc.contributor.authorHeuken, M.
dc.date.accessioned2021-10-18T19:33:06Z
dc.date.available2021-10-18T19:33:06Z
dc.date.issued2010-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17691
dc.sourceIIOimport
dc.titleSelective epitaxial growth of III-V semiconductor heterostructures on Si substrates for logic applications
dc.typeMeeting abstract
dc.contributor.imecauthorWaldron, Niamh
dc.contributor.imecauthorWinderickx, Gillis
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorDekoster, Johan
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1952
dc.source.conference218th Electrochemical Society Meeting: SiGe, Ge & Related Compounds: Materials, Processing, and Devices Symposium
dc.source.conferencedate10/10/2010
dc.source.conferencelocationLas Vegas, NV USA
imec.availabilityPublished - open access
imec.internalnotesECS Meeting Abstracts; Vol. 2010-02


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