Authors

Noda, Taichi; Vandervorst, Wilfried; Vrancken, Christa; Ortolland, Claude; Rosseel, Erik; Absil, Philippe; Biesemans, Serge; Hoffmann, Thomas Y.

Conference

IEEE International Electron Devices Meeting - IEDM

Title

Analysis of pocket profile deactivation and its impact on Vth variation for laser annealed device using an atomistic kinetic Monte Carlo approach

Publication type

Proceedings paper

Embargo date

9999-12-31